Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments
نویسندگان
چکیده
Aluminum plays a central role in the world of electronic oxide materials. Yet, aluminum sources are very difficult to handle during molecular-beam epitaxy, main reason for which is high oxidization potential aluminum. In this work, we present thorough study behavior thermal laser epitaxy. We identify two distinct operating regimes. At laser-beam fluences, source emanates reproducible fluxes independent an applied oxygen pressure <10−1 hPa. lower beam flux increases with increasing (<10−1 hPa) due suboxide formation. demonstrate rate control over range 5 orders magnitude, can be expanded further. These results that epitaxy does not challenges associated evaporation
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ژورنال
عنوان ژورنال: Journal of vacuum science & technology
سال: 2023
ISSN: ['2327-9877', '0734-211X']
DOI: https://doi.org/10.1116/6.0002632